Publication:

Reliability issues in high-k stacks

Date

2004-09
Proceedings Paper
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Author(s)

Degraeve, Robin  
;
Crupi, Felice
;
Houssa, Michel  
;
Kwak, Dong Hwa
;
Kerber, Andreas
;
Cartier, Eduard
;
Kauerauf, Thomas
;
Roussel, Philippe  
;
Autran, Jean-Luc
;
Pourtois, Geoffrey  
;
Pantisano, Luigi
;
De Gendt, Stefan  
;
Heyns, Marc  
;
Groeseneken, Guido  

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1922 since deposited on 2021-10-15
Acq. date: 2025-10-24

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1922 since deposited on 2021-10-15
Acq. date: 2025-10-24

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