Publication:
3D Contact hole metrology accuracy and stability
Date
| dc.contributor.author | Storms, Greet | |
| dc.contributor.author | Barry, Kelly | |
| dc.contributor.author | Cheng, Shaunee | |
| dc.date.accessioned | 2021-10-16T05:29:43Z | |
| dc.date.available | 2021-10-16T05:29:43Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11283 | |
| dc.source.conference | Interface | |
| dc.source.conferencedate | 24/10/2005 | |
| dc.source.conferencelocation | San Diego, CA USA | |
| dc.title | 3D Contact hole metrology accuracy and stability | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |