Publication:
Copper CMP with composite polymer core – silica shell abrasives: a defectivity study
Date
| dc.contributor.author | Armini, Silvia | |
| dc.contributor.author | Whelan, Caroline | |
| dc.contributor.author | Moinpour, Mansour | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Armini, Silvia | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.contributor.orcidimec | Armini, Silvia::0000-0003-0578-3422 | |
| dc.date.accessioned | 2021-10-17T06:14:08Z | |
| dc.date.available | 2021-10-17T06:14:08Z | |
| dc.date.issued | 2008 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/13316 | |
| dc.source.beginpage | N11.4 | |
| dc.source.conference | Materials Research Society Spring Meeting Symposium N: Materials and Processes for Advanced Interconnects for Microelectronics | |
| dc.source.conferencedate | 23/03/2008 | |
| dc.source.conferencelocation | San Francisco, CA USA | |
| dc.title | Copper CMP with composite polymer core – silica shell abrasives: a defectivity study | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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