Publication:
The behaviour of oxygen in oxygenated n-type high-resistivity float-zone silicon
Date
| dc.contributor.author | Simoen, Eddy | |
| dc.contributor.author | Claeys, Cor | |
| dc.contributor.author | Job, R. | |
| dc.contributor.author | Ulyashin, A. G. | |
| dc.contributor.author | Fahrner, W. R. | |
| dc.contributor.author | Tonelli, G. | |
| dc.contributor.author | Degryse, O. | |
| dc.contributor.author | Clauws, P. | |
| dc.contributor.imecauthor | Simoen, Eddy | |
| dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
| dc.date.accessioned | 2021-10-14T23:10:44Z | |
| dc.date.available | 2021-10-14T23:10:44Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6829 | |
| dc.source.beginpage | 912 | |
| dc.source.conference | Semiconductor Silicon 2002. Proceedings of the 9th International Symposium on Silicon Materials Science and Technology | |
| dc.source.conferencedate | 13/05/2002 | |
| dc.source.conferencelocation | Philadelphia, PA USA | |
| dc.source.endpage | 924 | |
| dc.title | The behaviour of oxygen in oxygenated n-type high-resistivity float-zone silicon | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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