Publication:
Looking Inside MEMS Packages: Investigation of the Hermeticity of MEMS thin Film Packages
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1959 since deposited on 2021-10-23
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Acq. date: 2026-10-07
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Statistics
Views
1959 since deposited on 2021-10-23
2last month
2last week
Acq. date: 2026-10-07
Citations