Publication:

New technologies for reducing chemical costs and environmental impact

Date

1998
Proceedings Paper
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dc.contributor.authorHeyns, Marc
dc.contributor.authorCornelissen, Ingrid
dc.contributor.authorMertens, Paul
dc.contributor.authorMertens, S.
dc.contributor.authorMeuris, Marc
dc.contributor.authorRotondaro, Antonio
dc.contributor.authorSchaekers, Marc
dc.contributor.authorTeerlinck, Ivo
dc.contributor.authorVos, Rita
dc.contributor.authorWolke, K.
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorCornelissen, Ingrid
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorVos, Rita
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.accessioned2021-09-30T12:12:15Z
dc.date.available2021-09-30T12:12:15Z
dc.date.embargo9999-12-31
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2635
dc.source.conferenceTechnical Symposium SEMICON Europa: Environmentally Conscious Manufacturing - Can Environmental Action Also Save Money?
dc.source.conferencedate1/04/1998
dc.source.conferencelocationGeneva Switzerland
dc.title

New technologies for reducing chemical costs and environmental impact

dc.typeProceedings paper
dspace.entity.typePublication
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