Publication:
Random deposition as a growth mode in atomic layer deposition
Date
| dc.contributor.author | Puurunen, Riikka | |
| dc.date.accessioned | 2021-10-15T06:15:49Z | |
| dc.date.available | 2021-10-15T06:15:49Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8041 | |
| dc.source.conference | Atomic Layer Deposition Conference - ALD | |
| dc.source.conferencedate | 4/08/2003 | |
| dc.source.conferencelocation | San Jose, CA USA | |
| dc.title | Random deposition as a growth mode in atomic layer deposition | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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