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Vapor phase doping: an atomic layer deposition approach to n-type doping in classical chemical vapor deposition epitaxy
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1883 since deposited on 2021-10-17
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Acq. date: 2025-12-15
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Views
1883 since deposited on 2021-10-17
1last month
1last week
Acq. date: 2025-12-15
Citations