Pull-in voltage analysis of electrostatically actuated beam structures with fixed-fixed and fixed-free end conditions

dc.contributor.author	Pamidighantam, Sayanu
dc.contributor.author	Puers, Bob
dc.contributor.author	Baert, Kris
dc.contributor.author	Tilmans, Harrie
dc.contributor.imecauthor	Puers, Bob
dc.contributor.imecauthor	Tilmans, Harrie
dc.contributor.orcidimec	Tilmans, Harrie::0000-0003-4240-4962
dc.date.accessioned	2021-10-14T22:41:28Z
dc.date.available	2021-10-14T22:41:28Z
dc.date.issued	2002
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/6690
dc.source.beginpage	458
dc.source.endpage	464
dc.source.issue	4
dc.source.journal	Journal of Micromechanics and Microengineering
dc.source.volume	12
dc.title	Pull-in voltage analysis of electrostatically actuated beam structures with fixed-fixed and fixed-free end conditions
dc.type	Journal article
dspace.entity.type	Publication
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