Publication:
Stress engineered AlN/AlGaN superlattices as high-voltage current blocking layers on 200 mm Silicon
Date
| dc.contributor.author | Su, Jie | |
| dc.contributor.author | Liang, Hu | |
| dc.contributor.author | Posthuma, Niels | |
| dc.contributor.author | Wellekens, Dirk | |
| dc.contributor.author | Decoutere, Stefaan | |
| dc.contributor.author | Lee, Soo Min | |
| dc.contributor.author | Paranjpe, Ajit | |
| dc.contributor.imecauthor | Liang, Hu | |
| dc.contributor.imecauthor | Posthuma, Niels | |
| dc.contributor.imecauthor | Wellekens, Dirk | |
| dc.contributor.imecauthor | Decoutere, Stefaan | |
| dc.contributor.orcidimec | Posthuma, Niels::0000-0002-6029-1909 | |
| dc.contributor.orcidimec | Decoutere, Stefaan::0000-0001-6632-6239 | |
| dc.date.accessioned | 2021-10-24T14:21:28Z | |
| dc.date.available | 2021-10-24T14:21:28Z | |
| dc.date.issued | 2017 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/29515 | |
| dc.identifier.url | https://www.mrs.org/docs/default-source/meetings-events/mrs-conference-services/59th-EMC/preliminary-programs.pdf?sfvrsn=26 | |
| dc.source.beginpage | E6 | |
| dc.source.conference | 59th Electronic Materials Conference | |
| dc.source.conferencedate | 28/06/2017 | |
| dc.source.conferencelocation | South Bend, IN USA | |
| dc.title | Stress engineered AlN/AlGaN superlattices as high-voltage current blocking layers on 200 mm Silicon | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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