Implantation and activation of phosphorus in amorphous and crystalline Ge on Si

dc.contributor.author	Lieten, Ruben
dc.contributor.author	Beeman, Jeff W.
dc.contributor.author	Simoen, Eddy
dc.contributor.author	Haller, Eugene E.
dc.contributor.author	Dekoster, Johan
dc.contributor.author	Locquet, Jean-Pierre
dc.contributor.imecauthor	Lieten, Ruben
dc.contributor.imecauthor	Simoen, Eddy
dc.contributor.imecauthor	Dekoster, Johan
dc.contributor.orcidimec	Simoen, Eddy::0000-0002-5218-4046
dc.date.accessioned	2021-10-20T12:46:41Z
dc.date.available	2021-10-20T12:46:41Z
dc.date.issued	2012
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/21027
dc.source.conference	E-MRS Spring Meeting Symposium M : More than Moore: Novel materials approaches for functionalized Silicon based Microelectronics
dc.source.conferencedate	14/04/2012
dc.source.conferencelocation	Strasbourg France
dc.title	Implantation and activation of phosphorus in amorphous and crystalline Ge on Si
dc.type	Oral presentation
dspace.entity.type	Publication
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