Publication:

Experimental proximity matching of ArF scanners

Date

2008
Proceedings Paper
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dc.contributor.authorBekaert, Joost
dc.contributor.authorVan Look, Lieve
dc.contributor.authorDe Bisschop, Peter
dc.contributor.authorVan de Kerkhove, Jeroen
dc.contributor.authorVandenberghe, Geert
dc.contributor.authorSchreel, K.
dc.contributor.authorMenger, J.
dc.contributor.authorSchiffelers, G.
dc.contributor.authorKnols, E.
dc.contributor.authorvan der Laan, H.
dc.contributor.authorWillekers, R.
dc.contributor.imecauthorBekaert, Joost
dc.contributor.imecauthorVan Look, Lieve
dc.contributor.imecauthorDe Bisschop, Peter
dc.contributor.imecauthorVan de Kerkhove, Jeroen
dc.contributor.imecauthorVandenberghe, Geert
dc.contributor.orcidimecBekaert, Joost::0000-0003-3075-3479
dc.date.accessioned2021-10-17T06:16:30Z
dc.date.available2021-10-17T06:16:30Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13364
dc.source.beginpage714027
dc.source.conferenceSPIE Lithography Asia
dc.source.conferencedate4/11/2008
dc.source.conferencelocationTaipei Taiwan
dc.title

Experimental proximity matching of ArF scanners

dc.typeProceedings paper
dspace.entity.typePublication
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