Reaction Chemistry during the Atomic Layer Deposition of Sc2O3 and Gd2O3 from Sc(MeCp)3, Gd(iPrCp)3, and H2O

Publication:

2014

Journal article

Author(s)

Han, Jeong Hwan

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Chemistry of Materials

1861 since deposited on 2021-10-22

Acq. date: 2025-12-12