Publication:

Use of corona charge photo-conductance decay (charge-PCD) for fast metal contamination monitoring of high temperature processes

Date

2008
Proceedings Paper
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dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorBearda, Twan
dc.contributor.authorRosseel, Erik
dc.contributor.authorEveraert, Jean-Luc
dc.contributor.authorDon, Eric
dc.contributor.authorPavelka, Tibor
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorEveraert, Jean-Luc
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.date.accessioned2021-10-17T07:48:42Z
dc.date.available2021-10-17T07:48:42Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13908
dc.source.beginpage397
dc.source.conferenceIEEE/SEMI Advanced Semiconductor Manufacturing Conference - ASMC
dc.source.conferencedate5/05/2008
dc.source.conferencelocationBoston, MA USA
dc.source.endpage401
dc.title

Use of corona charge photo-conductance decay (charge-PCD) for fast metal contamination monitoring of high temperature processes

dc.typeProceedings paper
dspace.entity.typePublication
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