Publication:

'Just clean enough': wet cleaning for solar cell manufacturing applications

Date

2013
Proceedings Paper
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dc.contributor.authorWostyn, Kurt
dc.contributor.authorBaekelant, Wouter
dc.contributor.authorRip, Jens
dc.contributor.authorHaslinger, Michael
dc.contributor.authorKenis, Karine
dc.contributor.authorStruyf, Herbert
dc.contributor.authorClaes, Martine
dc.contributor.authorMertens, Paul
dc.contributor.authorDe Gendt, Stefan
dc.contributor.imecauthorWostyn, Kurt
dc.contributor.imecauthorRip, Jens
dc.contributor.imecauthorKenis, Karine
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorClaes, Martine
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecWostyn, Kurt::0000-0003-3995-0292
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-21T14:40:56Z
dc.date.available2021-10-21T14:40:56Z
dc.date.embargo9999-12-31
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23401
dc.identifier.urlhttp://www.scientific.net/SSP.195.293
dc.source.beginpage293
dc.source.conferenceUltra Clean Processing of Semiconductor Surfaces XI - UCPSS
dc.source.conferencedate17/09/2012
dc.source.conferencelocationLeuven Belgium
dc.source.endpage296
dc.title

'Just clean enough': wet cleaning for solar cell manufacturing applications

dc.typeProceedings paper
dspace.entity.typePublication
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