Publication:

3D-DRAM Si/SiGe superlattices: inspection strategies and evaluation

Date

2025
Proceedings Paper
https://doi.org/10.1117/12.3052524
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cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0000-0002-6377-4199
cris.virtual.orcid0000-0003-2169-8332
cris.virtual.orcid0000-0002-3947-1948
cris.virtual.orcid0000-0002-1439-590X
cris.virtual.orcid0000-0003-1356-9186
cris.virtual.orcid#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0000-0003-3498-5082
cris.virtual.orcid0000-0002-7503-8922
cris.virtual.orcid0000-0003-4745-0167
cris.virtual.orcid0000-0003-0873-9021
cris.virtual.orcid0000-0003-2467-1784
cris.virtual.orcid0000-0003-3513-6058
cris.virtual.orcid#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtualsource.departmentc49fd1e2-a117-4839-80dc-0e884525b195
cris.virtualsource.departmentfde8f386-0ddb-42e1-ad64-53cde7dda12d
cris.virtualsource.department3dbc40d2-16b3-43e9-acb4-defe6bae3499
cris.virtualsource.department51733ec3-79c7-4c34-9f77-3a0563c8f5a1
cris.virtualsource.departmentfe4e12ec-2492-48d4-ba6d-9d4db340b247
cris.virtualsource.department5ce755b6-7aea-44b8-9603-179aa300e12d
cris.virtualsource.departmentf0b7574f-2dc5-489e-ab45-d7fb89573586
cris.virtualsource.department0cddeaa4-4a9c-44ee-a5d6-ba4f3945e8a7
cris.virtualsource.department9a3d60e7-3e8b-4366-b479-ea599b23d28b
cris.virtualsource.department264c186e-7bc4-4bed-8d4f-11fe1bff9e26
cris.virtualsource.department37dfdb35-525f-4d92-a0c0-f6bfc29d57f1
cris.virtualsource.department9688c6c3-6d95-4d12-b7a3-176d84ad0eef
cris.virtualsource.department2d7dd015-fa43-4fbb-89fc-68f144075506
cris.virtualsource.departmenta583df42-7c11-41df-86a2-999be09a2617
cris.virtualsource.orcidc49fd1e2-a117-4839-80dc-0e884525b195
cris.virtualsource.orcidfde8f386-0ddb-42e1-ad64-53cde7dda12d
cris.virtualsource.orcid3dbc40d2-16b3-43e9-acb4-defe6bae3499
cris.virtualsource.orcid51733ec3-79c7-4c34-9f77-3a0563c8f5a1
cris.virtualsource.orcidfe4e12ec-2492-48d4-ba6d-9d4db340b247
cris.virtualsource.orcid5ce755b6-7aea-44b8-9603-179aa300e12d
cris.virtualsource.orcidf0b7574f-2dc5-489e-ab45-d7fb89573586
cris.virtualsource.orcid0cddeaa4-4a9c-44ee-a5d6-ba4f3945e8a7
cris.virtualsource.orcid9a3d60e7-3e8b-4366-b479-ea599b23d28b
cris.virtualsource.orcid264c186e-7bc4-4bed-8d4f-11fe1bff9e26
cris.virtualsource.orcid37dfdb35-525f-4d92-a0c0-f6bfc29d57f1
cris.virtualsource.orcid9688c6c3-6d95-4d12-b7a3-176d84ad0eef
cris.virtualsource.orcid2d7dd015-fa43-4fbb-89fc-68f144075506
cris.virtualsource.orcida583df42-7c11-41df-86a2-999be09a2617
dc.contributor.authorBeggiato, Matteo
dc.contributor.authorLoo, Roger
dc.contributor.authorWei, S.
dc.contributor.authorMoussa, Alain
dc.contributor.authorBast, G.
dc.contributor.authorFukaya, K.
dc.contributor.authorCerbu, Dorin
dc.contributor.authorJanardan, Nachiketa
dc.contributor.authorChirko, K.
dc.contributor.authorHan, Han
dc.contributor.authorDialameh, Masoud
dc.contributor.authorSantoro, G.
dc.contributor.authorLorusso, Gian
dc.contributor.authorIsawa, M.
dc.contributor.authorWimmer, P.
dc.contributor.authorKranert, C.
dc.contributor.authorReimann, C.
dc.contributor.authorKuhn, M.
dc.contributor.authorVigliante, A.
dc.contributor.authorMeersschaut, Johan
dc.contributor.imecauthorBeggiato, M.
dc.contributor.imecauthorLoo, R.
dc.contributor.imecauthorMoussa, A.
dc.contributor.imecauthorCerbu, D.
dc.contributor.imecauthorJanardan, N.
dc.contributor.imecauthorDialameh, M.
dc.contributor.imecauthorLorusso, G.
dc.contributor.imecauthorMeersschaut, J.
dc.contributor.imecauthorBelmonte, A.
dc.contributor.imecauthorBeral, C.
dc.contributor.imecauthorCharley, A. -L.
dc.contributor.imecauthorKar, G. S.
dc.contributor.imecauthorBogdanowicz, J.
dc.date.accessioned2025-07-28T03:57:59Z
dc.date.available2025-07-28T03:57:59Z
dc.date.issued2025
dc.description.wosFundingTextThe authors acknowledge the 3D-DRAM program for their support throughout the development of this work. A special mention goes to all our partners which backed such research through discussions, exchanges and continuous development support. Our gratitude also goes to our colleagues in the AMI, EPI-IV, and IMC groups for their helpful contribution at any point in time.
dc.identifier.doi10.1117/12.3052524
dc.identifier.eisbn978-1-5106-8639-7
dc.identifier.isbn978-1-5106-8638-0
dc.identifier.issn0277-786X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/45967
dc.publisherSPIE-INT SOC OPTICAL ENGINEERING
dc.source.beginpage1342612-1
dc.source.conference2025 Conference on Metrology Inspection and Process Control-Annual
dc.source.conferencedate2025-02-24
dc.source.conferencelocationSan Jose
dc.source.journalProceedings of SPIE
dc.source.numberofpages1342612-5
dc.title

3D-DRAM Si/SiGe superlattices: inspection strategies and evaluation

dc.typeProceedings paper
dspace.entity.typePublication
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