Publication:
3D-DRAM Si/SiGe superlattices: inspection strategies and evaluation
| dc.contributor.author | Beggiato, Matteo | |
| dc.contributor.author | Loo, Roger | |
| dc.contributor.author | Wei, S. | |
| dc.contributor.author | Moussa, Alain | |
| dc.contributor.author | Bast, G. | |
| dc.contributor.author | Fukaya, K. | |
| dc.contributor.author | Cerbu, Dorin | |
| dc.contributor.author | Janardan, Nachiketa | |
| dc.contributor.author | Chirko, K. | |
| dc.contributor.author | Han, Han | |
| dc.contributor.author | Dialameh, Masoud | |
| dc.contributor.author | Santoro, G. | |
| dc.contributor.author | Lorusso, Gian | |
| dc.contributor.author | Isawa, M. | |
| dc.contributor.author | Wimmer, P. | |
| dc.contributor.author | Kranert, C. | |
| dc.contributor.author | Reimann, C. | |
| dc.contributor.author | Kuhn, M. | |
| dc.contributor.author | Vigliante, A. | |
| dc.contributor.author | Meersschaut, Johan | |
| dc.contributor.imecauthor | Beggiato, M. | |
| dc.contributor.imecauthor | Loo, R. | |
| dc.contributor.imecauthor | Moussa, A. | |
| dc.contributor.imecauthor | Cerbu, D. | |
| dc.contributor.imecauthor | Janardan, N. | |
| dc.contributor.imecauthor | Dialameh, M. | |
| dc.contributor.imecauthor | Lorusso, G. | |
| dc.contributor.imecauthor | Meersschaut, J. | |
| dc.contributor.imecauthor | Belmonte, A. | |
| dc.contributor.imecauthor | Beral, C. | |
| dc.contributor.imecauthor | Charley, A. -L. | |
| dc.contributor.imecauthor | Kar, G. S. | |
| dc.contributor.imecauthor | Bogdanowicz, J. | |
| dc.date.accessioned | 2025-07-28T03:57:59Z | |
| dc.date.available | 2025-07-28T03:57:59Z | |
| dc.date.issued | 2025 | |
| dc.description.wosFundingText | The authors acknowledge the 3D-DRAM program for their support throughout the development of this work. A special mention goes to all our partners which backed such research through discussions, exchanges and continuous development support. Our gratitude also goes to our colleagues in the AMI, EPI-IV, and IMC groups for their helpful contribution at any point in time. | |
| dc.identifier.doi | 10.1117/12.3052524 | |
| dc.identifier.eisbn | 978-1-5106-8639-7 | |
| dc.identifier.isbn | 978-1-5106-8638-0 | |
| dc.identifier.issn | 0277-786X | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/45967 | |
| dc.publisher | SPIE-INT SOC OPTICAL ENGINEERING | |
| dc.source.beginpage | 1342612-1 | |
| dc.source.conference | 2025 Conference on Metrology Inspection and Process Control-Annual | |
| dc.source.conferencedate | 2025-02-24 | |
| dc.source.conferencelocation | San Jose | |
| dc.source.journal | Proceedings of SPIE | |
| dc.source.numberofpages | 1342612-5 | |
| dc.title | 3D-DRAM Si/SiGe superlattices: inspection strategies and evaluation | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: | ||