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Nucleation of 2D WS2 by plasma enhanced atomic layer deposition from WF6, H2 plasma and H2S - Impact on grain size and charge transport

Date

2017
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dc.contributor.authorGroven, Benjamin
dc.contributor.authorNalin Mehta, Ankit
dc.contributor.authorSmets, Quentin
dc.contributor.authorSchram, Tom
dc.contributor.authorBender, Hugo
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorRadu, Iuliana
dc.contributor.authorCaymax, Matty
dc.contributor.authorHeyns, Marc
dc.contributor.authorDelabie, Annelies
dc.contributor.imecauthorGroven, Benjamin
dc.contributor.imecauthorNalin Mehta, Ankit
dc.contributor.imecauthorSmets, Quentin
dc.contributor.imecauthorSchram, Tom
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorRadu, Iuliana
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.orcidimecGroven, Benjamin::0000-0002-5781-7594
dc.contributor.orcidimecNalin Mehta, Ankit::0000-0002-2169-940X
dc.contributor.orcidimecSmets, Quentin::0000-0002-2356-5915
dc.contributor.orcidimecSchram, Tom::0000-0003-1533-7055
dc.contributor.orcidimecRadu, Iuliana::0000-0002-7230-7218
dc.date.accessioned2021-10-24T05:14:17Z
dc.date.available2021-10-24T05:14:17Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28425
dc.identifier.urlhttps://www.avs.org/Symposium
dc.source.conferenceAVS 64th International Symposium & Exhibition
dc.source.conferencedate29/10/2017
dc.source.conferencelocationTampa Florida, US
dc.title

Nucleation of 2D WS2 by plasma enhanced atomic layer deposition from WF6, H2 plasma and H2S - Impact on grain size and charge transport

dc.typeMeeting abstract
dspace.entity.typePublication
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