Publication:
Development and characterization of a fast neutral beam source for damage-free etching
Date
| dc.contributor.author | Marinov, Daniil | |
| dc.contributor.author | El Otell, Ziad | |
| dc.contributor.author | Bowden, Mark | |
| dc.contributor.author | Braithwaite, Nicholas | |
| dc.contributor.imecauthor | El Otell, Ziad | |
| dc.date.accessioned | 2021-10-22T03:32:29Z | |
| dc.date.available | 2021-10-22T03:32:29Z | |
| dc.date.issued | 2014 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/24211 | |
| dc.source.beginpage | na | |
| dc.source.conference | 41st IOP Plasma Physics Conference | |
| dc.source.conferencedate | 14/04/2014 | |
| dc.source.conferencelocation | London UK | |
| dc.title | Development and characterization of a fast neutral beam source for damage-free etching | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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