Publication:
Mechanical integrity of nano-interconnects; the impact of metallization density
Date
| dc.contributor.author | Zahedmanesh, Houman | |
| dc.contributor.author | Vanstreels, Kris | |
| dc.contributor.imecauthor | Zahedmanesh, Houman | |
| dc.contributor.imecauthor | Vanstreels, Kris | |
| dc.contributor.orcidimec | Vanstreels, Kris::0000-0002-4420-0966 | |
| dc.date.accessioned | 2021-10-28T00:21:44Z | |
| dc.date.available | 2021-10-28T00:21:44Z | |
| dc.date.issued | 2019 | |
| dc.identifier.issn | 2590-0072 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/34509 | |
| dc.identifier.url | https://doi.org/10.1016/j.mne.2018.12.001 | |
| dc.source.beginpage | 35 | |
| dc.source.endpage | 40 | |
| dc.source.journal | Micro and Nano Engineering | |
| dc.source.volume | 2 | |
| dc.title | Mechanical integrity of nano-interconnects; the impact of metallization density | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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