Publication:
Determining the impact of statistical fluctuations on resist edge roughness
Date
| dc.contributor.author | Leunissen, Peter | |
| dc.contributor.author | Ercken, Monique | |
| dc.contributor.author | Patsis, G.P. | |
| dc.contributor.imecauthor | Ercken, Monique | |
| dc.date.accessioned | 2021-10-16T02:52:39Z | |
| dc.date.available | 2021-10-16T02:52:39Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10771 | |
| dc.source.beginpage | 2 | |
| dc.source.endpage | 10 | |
| dc.source.journal | Microelectronic Engineering | |
| dc.source.volume | 78-79 | |
| dc.title | Determining the impact of statistical fluctuations on resist edge roughness | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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