Publication:

Potential remedies for the VT/Vfb-shift problem of Hf/polysilicon-based gate stacks: a solution-based survey

Date

2005-01
Journal article
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Author(s)

Deweerd, Wim
;
Kaushik, Vidya
;
Chen, J.
;
Shimamoto, Y.
;
Schram, Tom  
;
Ragnarsson, Lars-Ake  
;
Delabie, Annelies  
;
Pantisano, Luigi
;
Eyckens, Brenda
;
Maes, J.W.
;
De Gendt, Stefan  
;
Heyns, Marc  

Journal

Microelectronics Reliability

Abstract

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1936 since deposited on 2021-10-16
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Acq. date: 2026-01-25

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