Publication:
Scaling of low-k dielectrics: a bumpy road
Date
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.author | Zhao, Larry | |
| dc.contributor.author | Vereecke, Bart | |
| dc.contributor.imecauthor | Vereecke, Bart | |
| dc.date.accessioned | 2021-10-18T15:17:47Z | |
| dc.date.available | 2021-10-18T15:17:47Z | |
| dc.date.issued | 2010 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/16701 | |
| dc.source.beginpage | F5.6 | |
| dc.source.conference | MRS Spring Meeting Symp. F: Materials, Processes, Integration, and Reliability in Advanced Interconnects for Micro- and Nanoelec | |
| dc.source.conferencedate | 5/04/2010 | |
| dc.source.conferencelocation | San Francisco, CA USA | |
| dc.title | Scaling of low-k dielectrics: a bumpy road | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |