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The impact of dummy gate processing on Si-cap-free SiGe passivation: a physical characterization study on strained SiGe 25% and 45%
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1776 since deposited on 2021-10-24
Acq. date: 2026-02-24
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Views
1776 since deposited on 2021-10-24
Acq. date: 2026-02-24
Citations