Publication:
CMOS patterning over high aspect ratio topographies for N10/N7 using spin-on carbon hardmasks
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1913 since deposited on 2021-10-24
5last month
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Acq. date: 2026-02-24
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Statistics
Views
1913 since deposited on 2021-10-24
5last month
1last week
Acq. date: 2026-02-24
Citations