Publication:

Oxygen in silicon

Date

1994
Book Chapter
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dc.contributor.authorBender, Hugo
dc.contributor.authorVanhellemont, Jan
dc.contributor.imecauthorBender, Hugo
dc.date.accessioned2021-09-29T12:39:48Z
dc.date.available2021-09-29T12:39:48Z
dc.date.embargo9999-12-31
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/38
dc.source.beginpage1637
dc.source.bookHandbook on Semiconductors. Vol. 3b: Materials, Properties and Preparations
dc.source.endpage1753
dc.title

Oxygen in silicon

dc.typeBook chapter
dspace.entity.typePublication
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