A deep-level transient spectroscopy study of silicon Schottky barriers containing a Si-O superlattice

dc.contributor.author	Simoen, Eddy
dc.contributor.author	Jayachandran, Suseendran
dc.contributor.author	Delabie, Annelies
dc.contributor.author	Caymax, Matty
dc.contributor.author	Heyns, Marc
dc.contributor.imecauthor	Simoen, Eddy
dc.contributor.imecauthor	Jayachandran, Suseendran
dc.contributor.imecauthor	Delabie, Annelies
dc.contributor.imecauthor	Caymax, Matty
dc.contributor.imecauthor	Heyns, Marc
dc.contributor.orcidimec	Simoen, Eddy::0000-0002-5218-4046
dc.date.accessioned	2021-10-24T13:35:01Z
dc.date.available	2021-10-24T13:35:01Z
dc.date.issued	2017
dc.identifier.issn	0370-1972
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/29440
dc.identifier.url	http://onlinelibrary.wiley.com/doi/10.1002/pssb.201600593/full
dc.source.beginpage	1600593
dc.source.issue	4
dc.source.journal	Physica Status Solidi B
dc.source.volume	254
dc.title	A deep-level transient spectroscopy study of silicon Schottky barriers containing a Si-O superlattice
dc.type	Journal article
dspace.entity.type	Publication
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