Publication:
Impact of curing condition on chemical stability of ultralow-k PMO material
Date
| dc.contributor.author | Krishtab, Mikhail | |
| dc.contributor.author | Zhang, Liping | |
| dc.contributor.author | Le, Quoc Toan | |
| dc.contributor.author | Vanstreels, Kris | |
| dc.contributor.author | Souriau, Laurent | |
| dc.contributor.author | Phillips, Mark | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.imecauthor | Krishtab, Mikhail | |
| dc.contributor.imecauthor | Zhang, Liping | |
| dc.contributor.imecauthor | Le, Quoc Toan | |
| dc.contributor.imecauthor | Vanstreels, Kris | |
| dc.contributor.imecauthor | Souriau, Laurent | |
| dc.contributor.orcidimec | Le, Quoc Toan::0000-0002-0206-6279 | |
| dc.contributor.orcidimec | Vanstreels, Kris::0000-0002-4420-0966 | |
| dc.contributor.orcidimec | Souriau, Laurent::0000-0002-5138-5938 | |
| dc.date.accessioned | 2021-10-20T12:21:46Z | |
| dc.date.available | 2021-10-20T12:21:46Z | |
| dc.date.issued | 2012 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20952 | |
| dc.source.beginpage | mrss12-1428-c02- | |
| dc.source.conference | Interconnect Challenges for CMOS Technology - Materials, Processes and Reliability for Downscaling, Packaging and 3D Stacking | |
| dc.source.conferencedate | 9/04/2012 | |
| dc.source.conferencelocation | San Francisco, CA USA | |
| dc.title | Impact of curing condition on chemical stability of ultralow-k PMO material | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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