Publication:
Study of photon induced volatilization of copper and process control of metal etch plasmas
Date
| dc.contributor.author | Dictus, Dries | |
| dc.contributor.imecauthor | Dictus, Dries | |
| dc.contributor.orcidimec | Dictus, Dries::0000-0002-7896-1747 | |
| dc.contributor.thesisadvisor | De Gendt, Stefan | |
| dc.date.accessioned | 2021-10-19T13:16:46Z | |
| dc.date.available | 2021-10-19T13:16:46Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2011-01 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18844 | |
| dc.title | Study of photon induced volatilization of copper and process control of metal etch plasmas | |
| dc.type | PHD thesis | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |