Publication:
Improved channel hot carrier reliability in p-FinFETs with replacement metal gate by a nitrogen post deposition anneal process
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1854 since deposited on 2021-10-22
1last month
Acq. date: 2026-04-06
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Statistics
Views
1854 since deposited on 2021-10-22
1last month
Acq. date: 2026-04-06
Citations