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Ultra low-k materials: challenges of scaling
Publication:
Ultra low-k materials: challenges of scaling
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Date
2010
Proceedings Paper
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21673.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Zhao, Larry
;
Baklanov, Mikhaïl
;
Pantouvaki, Marianna
;
Tokei, Zsolt
;
Beyer, Gerald
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1880
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Acq. date: 2025-12-16
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Metrics
Views
1880
since deposited on 2021-10-19
1
last month
Acq. date: 2025-12-16
Citations