Publication:
Surfactants in megasonic cleaning processes
Date
| dc.contributor.author | Holsteyns, Frank | |
| dc.contributor.author | Vos, Rita | |
| dc.contributor.author | Mertens, Paul | |
| dc.contributor.imecauthor | Holsteyns, Frank | |
| dc.contributor.imecauthor | Vos, Rita | |
| dc.contributor.imecauthor | Mertens, Paul | |
| dc.date.accessioned | 2021-10-15T04:56:02Z | |
| dc.date.available | 2021-10-15T04:56:02Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7659 | |
| dc.source.beginpage | 345 | |
| dc.source.conference | Abstracts of Papers of the American Chemical Society | |
| dc.source.conferencelocation | ||
| dc.title | Surfactants in megasonic cleaning processes | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |