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Versatile MEMS and MEMS integration technology platforms for cost effective MEMS development
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Acq. date: 2026-02-27
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Acq. date: 2026-02-27
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1 since deposited on 2021-10-18
Acq. date: 2026-02-27
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1839 since deposited on 2021-10-18
1last month
Acq. date: 2026-02-27
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