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Versatile MEMS and MEMS integration technology platforms for cost effective MEMS development
Publication:
Versatile MEMS and MEMS integration technology platforms for cost effective MEMS development
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Date
2009
Proceedings Paper
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19978.pdf
271.32 KB
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Pieters, Philip
Journal
Abstract
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1
since deposited on 2021-10-18
Acq. date: 2025-12-16
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1837
since deposited on 2021-10-18
Acq. date: 2025-12-16
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Downloads
1
since deposited on 2021-10-18
Acq. date: 2025-12-16
Views
1837
since deposited on 2021-10-18
Acq. date: 2025-12-16
Citations