Publication:
Correlation between solvent diffusion, porosity and pore sealing for low k dielectrics
Date
| dc.contributor.author | Abell, Thomas | |
| dc.contributor.author | Shamiryan, Denis | |
| dc.contributor.author | Patz, Matthias | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-10-15T03:58:30Z | |
| dc.date.available | 2021-10-15T03:58:30Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7112 | |
| dc.source.conference | Advanced Metallization Conference | |
| dc.source.conferencedate | 21/10/2003 | |
| dc.source.conferencelocation | Montreal Canada | |
| dc.title | Correlation between solvent diffusion, porosity and pore sealing for low k dielectrics | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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