Publication:
Optical methods for the reliability and failure analysis of RF MEMS
Date
| dc.contributor.author | van Spengen, Merlijn | |
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.date.accessioned | 2021-10-15T17:14:47Z | |
| dc.date.available | 2021-10-15T17:14:47Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9793 | |
| dc.source.conference | ISMA Conference on Noise and Vibration Engineering | |
| dc.source.conferencedate | 20/09/2004 | |
| dc.source.conferencelocation | Leuven Belgium | |
| dc.title | Optical methods for the reliability and failure analysis of RF MEMS | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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