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Split and design guidelines for double patterning
Publication:
Split and design guidelines for double patterning
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Date
2008
Proceedings Paper
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14691.pdf
2.54 MB
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Wiaux, Vincent
;
Verhaegen, Staf
;
Cheng, Shaunee
;
Iwamoto, Fumio
;
Jaenen, Patrick
;
Maenhoudt, Mireille
;
Matsuda, Takashi
;
Postnikov, Sergey
;
Vandenberghe, Geert
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1879
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Acq. date: 2025-12-10
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Metrics
Views
1879
since deposited on 2021-10-17
2
last month
1
last week
Acq. date: 2025-12-10
Citations