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Effect of O-2 post-deposition anneals on the properties of ultra-thin SiOx/ZrO2 gate dielectric stacks
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1909 since deposited on 2021-10-14
Acq. date: 2025-10-23
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Views
1909 since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations