Publication:
Effect of O-2 post-deposition anneals on the properties of ultra-thin SiOx/ZrO2 gate dielectric stacks
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1912 since deposited on 2021-10-14
1last month
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Acq. date: 2025-12-09
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Views
1912 since deposited on 2021-10-14
1last month
1last week
Acq. date: 2025-12-09
Citations