Publication:
pMOS transistor with embedded SiGe: elastic and plastic relaxation issues
Date
| dc.contributor.author | Hikavyy, Andriy | |
| dc.contributor.author | Bhouri, Nada | |
| dc.contributor.author | Loo, Roger | |
| dc.contributor.author | Verheyen, Peter | |
| dc.contributor.author | Clemente, Francesca | |
| dc.contributor.author | Hopkins, John | |
| dc.contributor.author | Trussell, Rob | |
| dc.contributor.author | Caymax, Matty | |
| dc.contributor.imecauthor | Hikavyy, Andriy | |
| dc.contributor.imecauthor | Loo, Roger | |
| dc.contributor.imecauthor | Verheyen, Peter | |
| dc.contributor.imecauthor | Caymax, Matty | |
| dc.contributor.orcidimec | Hikavyy, Andriy::0000-0002-8201-075X | |
| dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
| dc.date.accessioned | 2021-10-16T16:40:27Z | |
| dc.date.available | 2021-10-16T16:40:27Z | |
| dc.date.issued | 2007 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12297 | |
| dc.source.beginpage | 145 | |
| dc.source.conference | 5th International Conference on Silicon Epitaxy and Heterostructures - ICSI-5 | |
| dc.source.conferencedate | 20/05/2007 | |
| dc.source.conferencelocation | Marseille France | |
| dc.source.endpage | 146 | |
| dc.title | pMOS transistor with embedded SiGe: elastic and plastic relaxation issues | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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