Publication:

Island growth in atomic layer deposition: a phenomenological model

Date

2004
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorPuurunen, Riikka
dc.contributor.authorDelabie, Annelies
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.accessioned2021-10-15T15:39:39Z
dc.date.available2021-10-15T15:39:39Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9475
dc.source.conferenceAtomic Layer Deposition Conference
dc.source.conferencedate16/08/2004
dc.source.conferencelocationHelsinki Finland
dc.title

Island growth in atomic layer deposition: a phenomenological model

dc.typeProceedings paper
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions