Publication:

Gate stack engineering to enhance high- $j/metal gate reliability for DRAM I/O applications

Date

2017

Proceedings Paper

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Files

36900.pdf 962.5 KB

Author(s)

O'Sullivan, Barry

;

Ritzenthaler, Romain

;

;

Dentoni Litta, Eugenio

;

;

Vaisman Chasin, Adrian

;

Linten, Dimitri

;

Horiguchi, Naoto

;

Machkaoutsan, Vladimir

;

;

Metrics

1972 since deposited on 2021-10-24

Acq. date: 2025-12-15