Publication:

Wet lateral oxidation of AlGaAs for passive and active guided wave components

Date

1998
Proceedings Paper
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dc.contributor.authorDe Mesel, Kurt
dc.contributor.authorSys, Carl
dc.contributor.authorCaekebeke, Kristien
dc.contributor.authorVerstuyft, Steven
dc.contributor.authorDhoedt, Bart
dc.contributor.authorMoerman, Ingrid
dc.contributor.authorVan Daele, Peter
dc.contributor.authorBaets, Roel
dc.contributor.imecauthorVerstuyft, Steven
dc.contributor.imecauthorDhoedt, Bart
dc.contributor.imecauthorMoerman, Ingrid
dc.contributor.imecauthorVan Daele, Peter
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecDhoedt, Bart::0000-0002-7271-7479
dc.contributor.orcidimecVan Daele, Peter::0000-0003-0557-7741
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.accessioned2021-09-30T11:42:41Z
dc.date.available2021-09-30T11:42:41Z
dc.date.embargo9999-12-31
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2498
dc.source.beginpage109
dc.source.conferenceProceedings 3rd Annual Symposium of the IEEE/LEOS Benelux Chapter
dc.source.conferencedate26/11/1998
dc.source.conferencelocationGent Belgium
dc.source.endpage112
dc.title

Wet lateral oxidation of AlGaAs for passive and active guided wave components

dc.typeProceedings paper
dspace.entity.typePublication
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