Publication:
An innovative probe microscopy solution for measuring conductivity profiles in 3-dimensions
Date
| dc.contributor.author | Celano, Umberto | |
| dc.contributor.author | Paredis, Kristof | |
| dc.contributor.author | Humphris, Andrew | |
| dc.contributor.author | Tedaldi, Matt | |
| dc.contributor.author | O'Sullivan, Connor Laharn | |
| dc.contributor.author | Hole, Patrick | |
| dc.contributor.author | Goulden, Jenny | |
| dc.contributor.imecauthor | Celano, Umberto | |
| dc.contributor.imecauthor | Paredis, Kristof | |
| dc.contributor.imecauthor | O'Sullivan, Connor Laharn | |
| dc.contributor.orcidimec | Celano, Umberto::0000-0002-2856-3847 | |
| dc.contributor.orcidimec | Paredis, Kristof::0000-0002-5163-4164 | |
| dc.date.accessioned | 2021-10-31T08:12:04Z | |
| dc.date.available | 2021-10-31T08:12:04Z | |
| dc.date.issued | 2021 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/36559 | |
| dc.identifier.url | https://doi.org/10.1117/12.2583065 | |
| dc.source.beginpage | 116110J | |
| dc.source.conference | Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV | |
| dc.source.conferencedate | 22/02/2021 | |
| dc.source.conferencelocation | Online Online | |
| dc.title | An innovative probe microscopy solution for measuring conductivity profiles in 3-dimensions | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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