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Effect of built-in stress level of piezoelectric AlN thin films on the properties of vibrational energy harvesters
Publication:
Effect of built-in stress level of piezoelectric AlN thin films on the properties of vibrational energy harvesters
Date
2007
Proceedings Paper
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16199.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Karakaya, Koray
;
Renaud, Michael
;
Goedbloed, Martijn
;
Vullers, Ruud
Journal
Abstract
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1927
since deposited on 2021-10-16
Acq. date: 2025-10-24
Citations
Metrics
Views
1927
since deposited on 2021-10-16
Acq. date: 2025-10-24
Citations