Publication:
Effect of built-in stress level of piezoelectric AlN thin films on the properties of vibrational energy harvesters
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1931 since deposited on 2021-10-16
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Acq. date: 2026-03-17
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1931 since deposited on 2021-10-16
1last month
1last week
Acq. date: 2026-03-17
Citations