Publication:

Influence of absorbed water components on SiOCH low-k reliability

Date

2008-08
Journal article
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dc.contributor.authorLi, Yunlong
dc.contributor.authorCiofi, Ivan
dc.contributor.authorCarbonell, Laure
dc.contributor.authorHeylen, Nancy
dc.contributor.authorVan Aelst, Joke
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorMaex, Karen
dc.contributor.authorTokei, Zsolt
dc.contributor.imecauthorLi, Yunlong
dc.contributor.imecauthorCiofi, Ivan
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorVan Aelst, Joke
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorMaex, Karen
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecLi, Yunlong::0000-0003-4791-4013
dc.contributor.orcidimecCiofi, Ivan::0000-0003-1374-4116
dc.date.accessioned2021-10-17T08:21:25Z
dc.date.available2021-10-17T08:21:25Z
dc.date.embargo9999-12-31
dc.date.issued2008-08
dc.identifier.issn0021-8979
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14029
dc.identifier.urlhttp://scitation.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=JAPIAU000104000003034113000001&idtype=cvips&gifs=yes
dc.source.beginpage34113
dc.source.issue3
dc.source.journalJournal of Applied Physics
dc.source.volume104
dc.title

Influence of absorbed water components on SiOCH low-k reliability

dc.typeJournal article
dspace.entity.typePublication
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