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Implications of progressive wear-out for lifetime extrapolation of ultra-thin (EOT~1nm) SiON films
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Implications of progressive wear-out for lifetime extrapolation of ultra-thin (EOT~1nm) SiON films
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Date
2004-12
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kaczer, Ben
;
Degraeve, Robin
;
O'Connor, Robert
;
Roussel, Philippe
;
Groeseneken, Guido
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1953
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1
last month
Acq. date: 2025-12-10
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Views
1953
since deposited on 2021-10-15
1
last month
Acq. date: 2025-12-10
Citations