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Outplating of metallic contaminants on silicon wafers from diluted acid solutions
Publication:
Outplating of metallic contaminants on silicon wafers from diluted acid solutions
Date
1995
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Rotondaro, Antonio
;
Hurd, Trace
;
Schmidt, Harald
;
Teerlinck, Ivo
;
Heyns, Marc
;
Claeys, Cor
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Acq. date: 2025-12-08
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2041
since deposited on 2021-09-29
1
last month
Acq. date: 2025-12-08
Citations