Publication:

A infrared pneumatic detector made by micromachining technology

Date

1994
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorChévrier, Jean-Baptiste
dc.contributor.authorBaert, Kris
dc.contributor.authorSlater, Tim
dc.date.accessioned2021-09-29T12:40:06Z
dc.date.available2021-09-29T12:40:06Z
dc.date.embargo9999-12-31
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/74
dc.source.beginpage214
dc.source.conferenceMicro Mechanics Europe Workshop - MME
dc.source.conferencedate04/09/1994
dc.source.conferencelocationPisa Italy
dc.source.endpage217
dc.title

A infrared pneumatic detector made by micromachining technology

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
66.pdf
Size:
190.95 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions