Publication:

Potential and pitfalls of the diode characterization technique for ULSI devices analysis

Date

2003
Proceedings Paper
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dc.contributor.authorPoyai, Amporn
dc.contributor.authorSimoen, Eddy
dc.contributor.authorClaeys, Cor
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.accessioned2021-10-15T06:14:38Z
dc.date.available2021-10-15T06:14:38Z
dc.date.embargo9999-12-31
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8036
dc.source.beginpage386
dc.source.conferenceAnalytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes
dc.source.conferencedate28/04/2003
dc.source.conferencelocationParis France
dc.source.endpage395
dc.title

Potential and pitfalls of the diode characterization technique for ULSI devices analysis

dc.typeProceedings paper
dspace.entity.typePublication
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