Publication:
Use of a capacitance voltage technique to study copper drift diffusion in (porous) inorganic low-k Materials
Date
| dc.contributor.author | Lanckmans, Filip | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-10-14T22:08:24Z | |
| dc.date.available | 2021-10-14T22:08:24Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6516 | |
| dc.source.beginpage | 125 | |
| dc.source.endpage | 132 | |
| dc.source.issue | 1_2 | |
| dc.source.journal | Microelectronic Engineering | |
| dc.source.volume | 60 | |
| dc.title | Use of a capacitance voltage technique to study copper drift diffusion in (porous) inorganic low-k Materials | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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