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Impact of O2-based plasma strip chemistries on the electrochemical behavior of TiN electrodes for biomedical applications
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Impact of O2-based plasma strip chemistries on the electrochemical behavior of TiN electrodes for biomedical applications
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Date
2012-11
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Collaert, Nadine
;
Mannaert, Geert
;
Paraschiv, Vasile
;
Goossens, Danny
;
Demand, Marc
;
Eberle, Wolfgang
Journal
Microelectronic Engineering
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1865
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Acq. date: 2025-12-15
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Metrics
Views
1865
since deposited on 2021-10-20
1
last month
Acq. date: 2025-12-15
Citations