Publication:
Turning innovative MEMS concepts into products using IMEC's CMORE platform
Date
| dc.contributor.author | Witvrouw, Ann | |
| dc.contributor.author | Cartuyvels, Rudi | |
| dc.contributor.imecauthor | Cartuyvels, Rudi | |
| dc.date.accessioned | 2021-10-18T05:22:50Z | |
| dc.date.available | 2021-10-18T05:22:50Z | |
| dc.date.issued | 2009-12 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/16555 | |
| dc.source.conference | SEMI Technology Symposium - STS | |
| dc.source.conferencedate | 2/12/2009 | |
| dc.source.conferencelocation | Tokyo Japan | |
| dc.title | Turning innovative MEMS concepts into products using IMEC's CMORE platform | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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